Performance Evaluation of RF Generators with In-Situ Plasma Process Monitoring Sensors
Jo, Kyung-Jae, Hong, Sang JeenVolume:
19
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2019.17057
Date:
October, 2019
File:
PDF, 4.66 MB
english, 2019