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Effect on Silicon Nitride thin Films Properties at Various Powers of RF Magnetron Sputtering
Mustafa, M K, Majeed, U, Iqbal, YVolume:
7
Language:
english
Journal:
International Journal of Engineering & Technology
DOI:
10.14419/ijet.v7i4.30.22000
Date:
November, 2018
File:
PDF, 331 KB
english, 2018