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Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators
Mirzazadeh, Ramin, Mariani, StefanoVolume:
10
Language:
english
Journal:
Micromachines
DOI:
10.3390/mi10040263
Date:
April, 2019
File:
PDF, 1.90 MB
english, 2019