[IEEE 2019 IEEE International Symposium on Circuits and Systems (ISCAS) - Sapporo, Japan (2019.5.26-2019.5.29)] 2019 IEEE International Symposium on Circuits and Systems (ISCAS) - A Toolchain for Open-Loop Compensation of Hysteresis and Creep in Atomic Force Microscopes
Oliveri, Alberto, Raiteri, Roberto, Lodi, Matteo, Storace, MarcoYear:
2019
DOI:
10.1109/ISCAS.2019.8702537
File:
PDF, 285 KB
2019