Equivalent circuit consideration of frequency-shift-type acceleration sensor
Sasaki, Yoshifumi, Sugawara, Sumio, Kudo, SubaruVolume:
57
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.57.07LD08
Date:
July, 2018
File:
PDF, 1.54 MB
english, 2018