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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Process Control in Production-Worthy Plasma Doping Technology
Winder, Edmund J., Fang, Ziwei, Arevalo, Edwin, Miller, Tim, Persing, Harold, Singh, Vikram, Parrill, T. M.Volume:
866
Year:
2006
DOI:
10.1063/1.2401568
File:
PDF, 674 KB
2006