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Synthesis and Characterization of Plasma-Polymer Gate Dielectric Films for Graphene Field Effect Transistor Devices

Seo, Hyeon Jin, Gil, Yeong Eun, Hwang, Ki-Hwan, Ananth, Antony, Boo, Jin-Hyo
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Language:
english
Journal:
Electronic Materials Letters
DOI:
10.1007/s13391-019-00139-6
Date:
April, 2019
File:
PDF, 1.88 MB
english, 2019
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