Amorphous Hydrogenated Silicon Nitride Deposited by Mercury...

Journal de Physique IV (Proceedings) /Le Journal de Physique IV 1995 / 06 Vol. 5; Iss. C5

Amorphous Hydrogenated Silicon Nitride Deposited by Mercury Photosensitization Chemical Vapour Deposition for Optoelectronic Applications

Pastorino, P., Morello, G., Tamagno, S.
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Volume:
5
Language:
english
Journal:
Le Journal de Physique IV
DOI:
10.1051/jphyscol:19955136
Date:
June, 1995
File:
PDF, 1.39 MB
english, 1995
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