Calibration of a simple heterodyne interferometric...

Optics Communications 2019 / 05 Vol. 439

Calibration of a simple heterodyne interferometric ellipsometer

Yu, Chih-Jen, Lin, Haw-Min, Peng, Kai-Qun
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Volume:
439
Journal:
Optics Communications
DOI:
10.1016/j.optcom.2019.01.067
Date:
May, 2019
File:
PDF, 725 KB
2019
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