Enhancement of downstream plasma density by a stepped-diameter radiofrequency plasma source under a static magnetic field for a compact sputtering reactor
Saito, Taichi, Takahashi, Kazunori, Ando, Akira, Hara, ShiroVolume:
163
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.02.036
Date:
May, 2019
File:
PDF, 791 KB
2019