A magnification-continuous calibration method for SEM-based...

Review of Scientific Instruments 2019 / 05 Vol. 90; Iss. 5

A magnification-continuous calibration method for SEM-based nanorobotic manipulation systems

Pang, Shuiquan, Zhang, Xianmin, Zhang, Xiang, Lu, Yihua
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Volume:
90
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5086940
Date:
May, 2019
File:
PDF, 6.79 MB
english, 2019
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