Preparation of Ge-Sb-Te Thin Films by Tellurization of Ge-Sb Thin Film for Phase-Change Random-Access Memory Application
Han, Byeol, Kim, Yewon, Kim, Yu-Jin, Cho, Mann-Ho, Rha, Sa-Kyun, Lee, Won-JunVolume:
8
Year:
2019
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0211904jss
File:
PDF, 1.14 MB
english, 2019