Effect of Substrate-Target Distance on the Structure of TiCrN Films Deposited from Mosaic Target by Reactive DC Magnetron Sputtering
Witit-Anun, Nirun, Buranawong, AdisornVolume:
798
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.798.163
Date:
April, 2019
File:
PDF, 3.92 MB
2019