3D Patterning of Si by Contact Etching With Nanoporous...

Frontiers in Chemistry 2019 / 4 Vol. 7

3D Patterning of Si by Contact Etching With Nanoporous Metals

Bastide, Stéphane, Torralba, Encarnacion, Halbwax, Mathieu, Le Gall, Sylvain, Mpogui, Elias, Cachet-Vivier, Christine, Magnin, Vincent, Harari, Joseph, Yarekha, Dmitri, Vilcot, Jean-Pierre
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Volume:
7
Language:
english
Journal:
Frontiers in Chemistry
DOI:
10.3389/fchem.2019.00256
Date:
April, 2019
File:
PDF, 9.76 MB
english, 2019
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