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Modern Technologies for Creating the Thin-film Systems and Coatings || Vanadium Oxide Thin Films Obtained by Thermal Annealing of Layers Deposited by RF Magnetron Sputtering at Room Temperature
Nikitenkov, Nikolay N.Volume:
10.5772/63
Year:
2017
Language:
english
DOI:
10.5772/67054
File:
PDF, 4.67 MB
english, 2017