Back-End of Line Compatible Transistors for Hybrid CMOS Applications
Liu, Po-Tsun, Kuo, Po-Yi, Chang, Chien-Min, Wei, Hsiu-Hsuan, Wu, Shih-Tse, Sun, EricVolume:
90
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/09001.0135ecst
Date:
April, 2019
File:
PDF, 388 KB
english, 2019