Lattice-Mismatch Strain and Confinement in Nanoscale Si/SiO 2 Structures Fabricated Using Thermal Oxidation
Vaughan, Erin I., Mayberry, Clay S., Huang, Danhong, Sharma, Ashwani K.Volume:
4
Year:
2019
Journal:
MRS Advances
DOI:
10.1557/adv.2019.124
File:
PDF, 525 KB
2019