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A Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor
Shimizu, Yuki, Ishida, Ayaka, Matsuno, Yuki, Matsukuma, Hiraku, Gao, WeiVolume:
2
Language:
english
Journal:
Nanomanufacturing and Metrology
DOI:
10.1007/s41871-019-00037-3
Date:
June, 2019
File:
PDF, 3.73 MB
english, 2019