Effect of Processing Parameters on Monolayer MoS2 Prepared by APCVD in a Quasiclosed Crucible
Yang, Yong, Pu, Hongbin, Li, Lianbi, Di, Junjie, Lin, Tao, Hu, Jichao, Zang, Yuan, Zhang, ShanLanguage:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-019-07297-1
Date:
May, 2019
File:
PDF, 6.27 MB
english, 2019