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Atomic force microscopy with integrated on-chip interferometric readout

Zawierta, Michal, Jeffery, Roger D., Putrino, Gino, Silva, K.K.M.B. Dilusha, Keating, Adrian, Martyniuk, Mariusz, Faraone, Lorenzo
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Language:
english
Journal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2019.05.011
Date:
May, 2019
File:
PDF, 1.56 MB
english, 2019
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