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Development of the Oil Filled High Pressure Sensor Using a Silicon Piezoresistive Strain Gauge
SHIMADA, Satoshi, ICHIKAWA, Norio, KUMAZAWA, Tetsuo, MURAYAMA, KenVolume:
25
Year:
1989
Journal:
Transactions of the Society of Instrument and Control Engineers
DOI:
10.9746/sicetr1965.25.524
File:
PDF, 2.21 MB
1989