[IEEE 2019 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2019.3.31-2019.4.4)] 2019 IEEE International Reliability Physics Symposium (IRPS) - Spatio-Temporal Defect Generation Process in Irradiated HfO 2 MOS Stacks: Correlated Versus Uncorrelated Mechanisms

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