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Effect of energetic particles on pulsed magnetron sputtering of hard nanocrystalline MBCN (M = Ti, Zr, Hf) films with high electrical conductivity
Mareš, Pavel, Vlček, Jaroslav, Houška, Jiří, Kohout, Jiří, Čapek, JiříLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.05.053
Date:
May, 2019
File:
PDF, 4.10 MB
english, 2019