Effect of energetic particles on pulsed magnetron...

  • Main
  • 2019 / 5
  • Effect of energetic particles on pulsed magnetron...

Effect of energetic particles on pulsed magnetron sputtering of hard nanocrystalline MBCN (M = Ti, Zr, Hf) films with high electrical conductivity

Mareš, Pavel, Vlček, Jaroslav, Houška, Jiří, Kohout, Jiří, Čapek, Jiří
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.05.053
Date:
May, 2019
File:
PDF, 4.10 MB
english, 2019
Conversion to is in progress
Conversion to is failed