Epitaxial growth and characterization of high quality In2O3...

Epitaxial growth and characterization of high quality In2O3 films on a-plane sapphire substrates by MOCVD

Du, Xuejian, Yu, Jing, Xiu, Xianwu, Sun, Qianqian, Tang, Wei, Man, Baoyuan
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Volume:
167
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.05.035
Date:
September, 2019
File:
PDF, 1.94 MB
english, 2019
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