Tip-based nano-manufacturing and -metrology

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2019 / 05 Vol. 37; Iss. 3

Tip-based nano-manufacturing and -metrology

Gotszalk, Teodor, Jóźwiak, Grzegorz, Radojewski, Jacek, Fröhlich, Thomas, Füssl, Roland, Manske, Eberhard, Holz, Mathias, Ivanov, Tzvetan, Ahmad, Ahmad, Rangelow, Ivo W.
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Volume:
37
Language:
english
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5083044
Date:
May, 2019
File:
PDF, 2.96 MB
english, 2019
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