Modeling of topography measuring instrument transfer...

Modeling of topography measuring instrument transfer functions by time series models

Keksel, A, Eifler, M, Seewig, J
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Volume:
29
Journal:
Measurement Science and Technology
DOI:
10.1088/1361-6501/aad467
Date:
September, 2018
File:
PDF, 4.85 MB
2018
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