Measurements of beam current density and space potential in...

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Plasma Sources Science and Technology 2019 / 04

Measurements of beam current density and space potential in a highly focused ion beam of extremely low energy

Hirano, Yoichi, Fujiwara, Yutaka, Kiyama, Satoru, Adachi, Yamato, Sakakita, H
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Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/ab18e7
Date:
April, 2019
File:
PDF, 2.53 MB
2019
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