Effects of sputtering gas on microstructure and...

Applied Surface Science 2019 / 09 Vol. 488

Effects of sputtering gas on microstructure and tribological properties of titanium nitride films

Zhang, Shidong, Yan, Fuyao, Yang, Yang, Yan, Mufu, Zhang, Yanxiang, Guo, Jinhao, Li, Hongtao
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Volume:
488
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.05.148
Date:
September, 2019
File:
PDF, 2.67 MB
english, 2019
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