Microstructure and Density of Mo Films in Multilayer Mo/Si...

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques 2019 / 1 Vol. 13; Iss. 1

Microstructure and Density of Mo Films in Multilayer Mo/Si Mirrors

Vainer, Yu. A., Garakhin, S. A., Polkovnikov, V. N., Salashchenko, N. N., Svechnikov, M. V., Chkhalo, N. I., Yunin, P. A.
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Volume:
13
Language:
english
Journal:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
DOI:
10.1134/S1027451019010208
Date:
January, 2019
File:
PDF, 906 KB
english, 2019
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