SiN x Deposition at Low...

ECS Transactions 2019 / 04 Vol. 89; Iss. 4

SiN x Deposition at Low Temperature Using UV-Irradiated NH 3

Shiba, Yoshinobu, Teramoto, Akinobu, Suwa, Tomoyuki, Ishii, Katsutoshi, Shimizu, Akira, Umezawa, Kota, Kuroda, Rihito, Sugawa, Shigetoshi
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Volume:
89
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/08904.0031ecst
Date:
April, 2019
File:
PDF, 371 KB
english, 2019
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