Monolithic Fabrication of NPN/SiN...

Advanced Materials Interfaces 2019 / 05

Monolithic Fabrication of NPN/SiN x Dual Membrane Cavity for Nanopore‐Based DNA Sensing

Madejski, Gregory R., Briggs, Kyle, DesOrmeaux, Jon‐Paul, Miller, Joshua J., Roussie, James A., Tabard‐Cossa, Vincent, McGrath, James L.
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Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201900684
Date:
May, 2019
File:
PDF, 3.87 MB
english, 2019
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