Accelerated ICP etching of 6H-SiC by femtosecond laser modification
Huang, Yigang, Tang, Fei, Guo, Zheng, Wang, XiaohaoVolume:
488
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.05.262
Date:
September, 2019
File:
PDF, 3.58 MB
english, 2019