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Near-field scanning microwave microscope platform based on a coaxial cavity resonator for the characterization of semiconductor structures

Bagdad, Bendehiba Abadlia, Lozano, Carmen, Gamiz, Francisco
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Language:
english
Journal:
Solid-State Electronics
DOI:
10.1016/j.sse.2019.03.052
Date:
March, 2019
File:
PDF, 1.60 MB
english, 2019
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