New approach to create a counting grid by ion-mask...

Vacuum 2019 / 07 Vol. 165

New approach to create a counting grid by ion-mask implantation for analysis of small biological objects

Evtugin, V.G., Rogov, A.M., Nuzhdin, V.I., Valeev, V.F., Kavetskyy, T.S., Khalilov, R.I., Stepanov, A.L.
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Volume:
165
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2019.04.044
Date:
July, 2019
File:
PDF, 2.00 MB
2019
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