Evolution of morphology and crystalline quality of...

Japanese Journal of Applied Physics 2019 / 06 Vol. 58; Iss. SC

Evolution of morphology and crystalline quality of DC-sputtered AlN films with high-temperature annealing

Mogami, Yosuke, Motegi, Shogo, Osawa, Atsushi, Osaki, Kazuto, Tanioka, Yukitake, Maeoka, Atsushi, Jo, Masafumi, Maeda, Noritoshi, Yaguchi, Hiroyuki, Hirayama, Hideki
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Volume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab1066
Date:
June, 2019
File:
PDF, 675 KB
2019
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