Black silicon with nanostructured surface formed by low...

Applied Surface Science 2019 / 09 Vol. 487

Black silicon with nanostructured surface formed by low energy helium plasma irradiation

Takamura, S., Aota, T., Iwata, H., Maenaka, S., Fujita, K., Kikuchi, Y., Uesugi, Y.
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Volume:
487
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2019.05.034
Date:
September, 2019
File:
PDF, 5.75 MB
2019
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