The Surface Reaction of a Low Flux Atomic Oxygen Beam with a Spin-Coated Polyimide Film: The Effect of Simultaneous UV Irradiation.
TAGAWA, Masahito, SUETOMI, Toru, KINOSHITA, Hiroshi, UMENO, Masataka, OHMAE, NobuoVolume:
47
Year:
1999
Journal:
Journal of the Japan Society for Aeronautical and Space Sciences
DOI:
10.2322/jjsass.47.182
File:
PDF, 628 KB
1999