Nano-Heteroepitaxy: An Investigation of SiGe Pillars...

ECS Journal of Solid State Science and Technology 2019 Vol. 8; Iss. 3

Nano-Heteroepitaxy: An Investigation of SiGe Pillars Coalescence

Mastari, M., Charles, M., Bogumilowicz, Y., Pimenta-Barros, P., Argoud, M., Tiron, R., Papon, A. M., Muyard, D., Chevalier, N., Landru, D., Kim, Y., Hartmann, J. M.
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Volume:
8
Year:
2019
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0101903jss
File:
PDF, 1.25 MB
2019
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