Development and Study of Composite Acoustic Resonators with...

Acoustical Physics 2019 / 5 Vol. 65; Iss. 3

Development and Study of Composite Acoustic Resonators with Al/(Al, Sc)N/Mo/Diamond Structure with a High Q Factor in the UHF Range

Sorokin, B. P., Novoselov, A. S., Kvashnin, G. M., Luparev, N. V., Asafiev, N. O., Shipilov, A. B., Aksenenkov, V. V.
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Volume:
65
Language:
english
Journal:
Acoustical Physics
DOI:
10.1134/S1063771019030072
Date:
May, 2019
File:
PDF, 724 KB
english, 2019
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