The study of Plasma Induced Damage on 65nm Silicon on Thin...

  • Main
  • 2019
  • The study of Plasma Induced Damage on 65nm Silicon on Thin...
IEEE Journal of the Electron Devices Society 2019

The study of Plasma Induced Damage on 65nm Silicon on Thin BOX transistor

Yamamoto, Yoshiki, Segi, Kazuhiko, Tsuda, Shibun, Makiyama, Hideki, Hasegawa, Takumi, Maekawa, Keiichi, Shinkawata, Hiroki, Yamashita, Tomohiro
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2019
Journal:
IEEE Journal of the Electron Devices Society
DOI:
10.1109/JEDS.2019.2917893
File:
PDF, 301 KB
2019
Conversion to is in progress
Conversion to is failed