Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma
Borude, Ranjit R., Sugiura, Hirotsugu, Ishikawa, Kenji, Tsutsumi, Takayoshi, Kondo, Hiroki, Han, Jeon Geon, Hori, MasaruVolume:
58
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/aaec87
Date:
February, 2019
File:
PDF, 1.58 MB
2019