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Nonlinear resistive switching features of rapid-thermal-annealed aluminum nitride dielectrics with modified charge trapping behaviors
Fu, Yi, Huang, Chu-Chun, Wang, Jer-ChyiVolume:
216
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2019.111033
Date:
August, 2019
File:
PDF, 1.55 MB
english, 2019