Regrown source/drain in InGaAs multi-gate MOSFETs
Miyamoto, Yasuyuki, Kanazawa, Toru, Kise, Nobukazu, Kinoshita, Haruki, Ohsawa, KazutoVolume:
522
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2019.06.014
Date:
September, 2019
File:
PDF, 1.02 MB
english, 2019