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Design of Tool for Exfoliation of Monocrystalline Microscale Silicon Films
Ward, Martin, Cullinan, MichaelVolume:
7
Language:
english
Journal:
Journal of Micro and Nano-Manufacturing
DOI:
10.1115/1.4043420
Date:
May, 2019
File:
PDF, 4.55 MB
english, 2019