![](/img/cover-not-exists.png)
[Advanced Micro and Nanosystems] Resonant MEMS (Fundamentals, Implementation and Application) ||
Brand, Oliver, Dufour, Isabelle, Heinrich, Stephen M., Josse, FabienVolume:
10.1002/97
Year:
2015
DOI:
10.1002/9783527676330
File:
PDF, 7.24 MB
2015