Atomic Layer Deposition: Atomic Layer Deposition of Al...

Advanced Materials Interfaces 2019 / 05 Vol. 6; Iss. 10

Atomic Layer Deposition: Atomic Layer Deposition of Al 2 O 3 Directly on 2D Materials for High‐Performance Electronics (Adv. Mater. Interfaces 10/2019)

Li, Na, Wei, Zheng, Zhao, Jing, Wang, Qinqin, Shen, Cheng, Wang, Shuopei, Tang, Jian, Yang, Rong, Shi, Dongxia, Zhang, Guangyu
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Volume:
6
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201970065
Date:
May, 2019
File:
PDF, 3.99 MB
2019
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