Seamless fabrication technique for micro to millimeter structures by combining 3D printing and photolithography
Tamura, Takahiro, Suzuki, TakaakiVolume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab09d0
Date:
June, 2019
File:
PDF, 1.53 MB
english, 2019