Progress and perspectives in dry processes for leading-edge...

Japanese Journal of Applied Physics 2019 / 06 Vol. 58; Iss. SE

Progress and perspectives in dry processes for leading-edge manufacturing of devices: toward intelligent processes and virtual product development

Iwase, Taku, Kamaji, Yoshito, Kang, Song Yun, Koga, Kazunori, Kuboi, Nobuyuki, Nakamura, Moritaka, Negishi, Nobuyuki, Nozaki, Tomohiro, Nunomura, Shota, Ogawa, Daisuke, Omura, Mitsuhiro, Shimizu, Tets
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Volume:
58
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab163b
Date:
June, 2019
File:
PDF, 2.97 MB
english, 2019
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