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Surface Topography and Optical Properties of Thin AlN Films Produced on GaAs (100) Substrate by Reactive Ion-Plasma Sputtering
Fomin, E. V., Bondarev, A. D., Rumyantseva, A. I., Maurer, T., Pikhtin, N. A., Tarasov, S. A.Volume:
45
Language:
english
Journal:
Technical Physics Letters
DOI:
10.1134/S1063785019030076
Date:
March, 2019
File:
PDF, 780 KB
english, 2019