Direct production of silicon nanostructures with electrochemical nanoimprinting
Li, Hailiang, Niu, Jiebin, Wang, Guanya, Wang, Enliang, Xie, ChangqingLanguage:
english
Journal:
ACS Applied Electronic Materials
DOI:
10.1021/acsaelm.9b00281
Date:
June, 2019
File:
PDF, 881 KB
english, 2019